Rapid Fabrication of Uniformly Sized Nanopores and Nanopore Arrays for Parallel DNA Analysis
Advanced Materials2006Vol. 18(23), pp. 3149–3153
Citations Over TimeTop 1% of 2006 papers
Abstract
Rapid fabrication of uniform nanopores and nanopore arrays in Si3N4 membranes (see figure) is achieved using a high-intensity electron beam. Expansion or contraction of the pores under electron-beam irradiation is observed and utilized for the controlled fabrication of highly uniform nanopores in the size range 2–20 nm. Our nanopores exhibit a truncated double-cone structure, as revealed by 3D-TEM tomography.
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