Semiconductor Sub‐Micro‐/ Nanochannel Networks by Deterministic Layer Wrinkling
Citations Over TimeTop 10% of 2007 papers
Abstract
Semiconductor micro-/nanochannel networks are developed by deterministic layer wrinkling and applied into a fluidics study. Both linear (see figure) and circular nanochannel networks, consisting of a main channel and several perpendicularly oriented branch channels, are created, where the periodicity and position of the branch channels can be tuned and controlled by changing the width of the partially released layers and by applying appropriate lithography. Supporting information for this article is available on the WWW under http://www.wiley-vch.de/contents/jc_2089/2007/c1622_s.html or from the author. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.
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