Ultra-Sensitive and Wide Sensing-Range Flexible Pressure Sensors Based on the Carbon Nanotube Film/Stress-Induced Square Frustum Structure

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Abstract

Flexible pressure sensors have attracted much attention due to their significant potentials in E-skin, artificial intelligence, and medical health monitoring. However, it still remains challenging to achieve high sensitivity and wide sensing range simultaneously, which greatly limit practical applications for flexible sensors. Inspired by the surface stress-induced structure of mimosa, we propose a novel flexible sensor based on the carbon nanotube paper film (CNTF) and stress-induced square frustum structure (SSFS) and demonstrated their excellent sensing performances. Based on interdigital electrodes and uniform CNTF consisting of fibers with large specific surface area, rich conductive paths are formed for enhanced resistance variation. Besides, both experiments and modeling are conducted to verify the synergistic effect of substrates with diverse stiffnesses and SSFS. The SSFS of polydimethylsiloxane transfer small pressure to the CNTF, resulting in sensitive responses with a broad resistance variation. The sensor achieves an ultrahigh sensitivity (2027.5 kPa-1) and a wide pressure range (0.0003-200 kPa). Therefore, it can not only detect human signals such as pulse, vocal cord vibration, wrist flexion, and foot pressure but also be integrated onto car tires to monitor vehicle statuses. These fascinating features endow the sensors with great potentials for future health monitoring, human-computer interaction, and virtual reality.

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