Nanoscale Growth and Patterning of Inorganic Oxides Using DNA Nanostructure Templates
Journal of the American Chemical Society2013Vol. 135(18), pp. 6778–6781
Citations Over TimeTop 10% of 2013 papers
Sumedh P. Surwade, Feng Zhou, Bryan Wei, Wei Sun, A. Blair Powell, Christina O’Donnell, Peng Yin, Haitao Liu
Abstract
We describe a method to form custom-shaped inorganic oxide nanostructures by using DNA nanostructure templates. We show that a DNA nanostructure can modulate the rate of chemical vapor deposition of SiO2 and TiO2 with nanometer-scale spatial resolution. The resulting oxide nanostructure inherits its shape from the DNA template. This method generates both positive-tone and negative-tone patterns on a wide range of substrates and is compatible with conventional silicon nanofabrication processes. Our result opens the door to the use of DNA nanostructures as general-purpose templates for high-resolution nanofabrication.
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