Directed Block Copolymer Thin Film Self-Assembly: Emerging Trends in Nanopattern Fabrication
Citations Over TimeTop 1% of 2013 papers
Abstract
Block copolymers have garnered significant attention in the past few decades due to their ability to self-assemble into nanoscale structures (∼10–100 nm), making them ideal for emerging nanotechnologies, such as nanolithography, nanotemplating, nanoporous membranes, and ultrahigh-density storage media. Many of these applications require thin film geometries, in which the block copolymers form well-ordered nanostructures and/or precisely controlled domain orientations. In this Perspective, we discuss recent progress toward techniques that achieve directed self-assembly of block copolymer thin films. Substrate prepatterning, nanoimprint lithography, molecular transfer printing, solvent treatment, and zone processing approaches are highlighted. Finally, we comment on recent developments in high-throughput and in situ characterization methods, and we provide future research directions for thin film nanostructure refinement.
Related Papers
- → Single digit nanofabrication by step-and-repeat nanoimprint lithography(2011)46 cited
- → Soft thermal nanoimprint lithography using a nanocomposite mold(2017)39 cited
- → Magnetic force assisted thermal nanoimprint lithography (MF-TNIL) for cost-effective fabrication of 2D nanosquare array(2020)2 cited
- → Step and Flash Imprint of Fluorinated Silicon-Containing Resist Materials for Three-Dimensional Nanofabrication(2010)5 cited
- → Nanofabrication of templates with ultra sharp SiC tips for nanoimprint lithography(2006)1 cited