Nanowire Arrays Defined by Nanoimprint Lithography
Nano Letters2004Vol. 4(4), pp. 699–702
Citations Over TimeTop 1% of 2004 papers
Thomas Mårtensson, Patrick Carlberg, Magnus T. Borgström, Lars Montelius, W. Seifert, Lars Samuelson
Abstract
We demonstrate the use of nanoimprint lithography to define arrays of vertical InP nanowires. Each nanowire is individually seeded from a catalyzing gold particle and then grown via vapor−liquid−solid growth in a metal−organic vapor phase epitaxy system. The diameter and position of each nanowire can be controlled to create engineered arrays, demonstrated with a hexagonal photonic crystal pattern. This combination of nanoimprint and self-assembly of nanostructures is attractive for photonics and electronics, as well as in life sciences.
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