Synthesis of Nearly Monodisperse Embedded Nanoparticles by Separating Nucleation and Growth in Ion Implantation
Nano Letters2005Vol. 5(2), pp. 373–377
Citations Over TimeTop 10% of 2005 papers
Abstract
We investigate the formation of nanoparticles of Au in SiO(2) by multiple ion implantation steps and intermediate anneals to isolate nucleation and growth, thereby producing a narrow particle size distribution. We discuss the effects of varying the initial nucleation dose and the growth temperature and establish guidelines for synthesizing nanoparticles with improved size uniformity. By this method, we have obtained a standard deviation of 16% on an average diameter of 1.68 nm, compared to 28% when no attempt is made to isolate nucleation and growth.
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