Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
Nature Nanotechnology2017Vol. 12(6), pp. 575–581
Citations Over TimeTop 1% of 2017 papers
Hyo Seon Suh, Do Han Kim, Priya Moni, Shisheng Xiong, Leonidas E. Ocola, Nestor J. Zaluzec, Karen K. Gleason, Paul F. Nealey
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