Glow discharge optical emission spectrometry: moving towards reliable thin film analysis–a short review
Journal of Analytical Atomic Spectrometry2003Vol. 18(6), pp. 670–679
Citations Over TimeTop 10% of 2003 papers
J. Angeli, Arne Bengtson, Annemie Bogaerts, Volker Hoffmann, Vasile‐Dan Hodoroaba, Edward B. M. Steers
Abstract
Glow discharge optical emission spectroscopy (GD-OES) is briefly reviewed, with particular reference to topics relevant to the application field of near surface and thin film analysis. The special needs and requirements for thin film analysis, in contrast to coating and bulk analysis, are pointed out. A task list is developed which shows the requirements of further developments to the technique and the fundamentals. The state-of-the-art is presented in measurement technique, GD source control and design, the effect of traces of molecular gases, correction and quantification procedures, contributions of modelling and, finally, reference materials for thin film analysis.
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