Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds
Lab on a Chip2007Vol. 7(12), pp. 1660–1660
Citations Over TimeTop 10% of 2007 papers
Abstract
We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.
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