Optimization of magnetic field structure of a compact 14 GHz ECR ion source

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Abstract

An electron cyclotron resonance condition at 14 GHz frequency has been realized for a compact negative hydrogen (H-) ion source with the discharge chamber made of a 55.5 mm diameter 42.5 mm long alumina cup. Two microwave launching systems had excited a hydrogen plasma in the discharge chamber: one that injects with the electric field perpendicular to the static magnetic field: and the other inject with the field parallel to the static field. The ion source performance is found always better when the electric field of the microwave is aligned parallel to the ECR magnetic field, and the reflected power has become nearly zero for this configuration when the position of a tuner to form a microwave cavity around the plasma is properly adjusted. The magnetic field structure near the extraction electrode is being optimized to increase H− ion current.

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