Laser photodeposition of metal films with microscopic features
Applied Physics Letters1979Vol. 35(2), pp. 175–177
Citations Over TimeTop 1% of 1979 papers
Abstract
Metal deposits with features smaller than 2 μm have been produced by the uv laser-induced photodissociation of organometallic compounds. Such laser-induced heterogeneous photochemical processes may have application in several areas of microelectronics including metallization, etching, and growth of semiconductor films.
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