Secondary electron spectrum of metals with different surface potential barriers

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Abstract

The secondary electron spectrum (SES) contains complex surface information and is widely used in surface analysis technology. A theoretical model of the SES for metals was proposed to reveal the effect of the surface potential barrier on the SES. In our model, an improved inner secondary electron energy distribution was established according to the free electron gas model. The transmission coefficient of inner secondary electrons was determined by solving the density of electronic states. Finally, the model was verified by our experiments, and the effects of the coverage fraction and potential barrier height, width, and form on the SES were comprehensively analyzed. The results show that H2O adsorption lowers the barrier height and enhances the tunneling effect, resulting in the most probable energy shifting toward the low-energy end and full width at half maximum narrowing. In addition, increasing or broadening the barrier can weaken the secondary electron tunneling effect, reduce the secondary electron number, and increase the most probable energy and the full width at half maximum. The model in this paper provides a reliable analysis method for studying the SES under different surface barriers for metals. Relevant results have significant value for the analysis of scanning electron microscopy images and optimization of secondary electron detection systems.

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