GaAs MQW modulators integrated with silicon CMOS
IEEE Photonics Technology Letters1995Vol. 7(4), pp. 360–362
Citations Over TimeTop 1% of 1995 papers
K.W. Goossen, James Alfred Walker, L.A. D'Asaro, S.P. Hui, B. Tseng, R. E. Leibenguth, D. Kossives, D. D. Bacon, D. Dahringer, L. M. F. Chirovsky, Anthony L. Lentine, David A. B. Miller
Abstract
We demonstrate integration of GaAs-AlGaAs multiple quantum well modulators to silicon CMOS circuitry via flip-chip solder-bonding followed by substrate removal. We obtain 95% device yield for 32/spl times/32 arrays of devices with 15 micron solder pads. We show operation of a simple circuit composed of a modulator and a CMOS transistor.>
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