Monolithic Silicon Waveguides in Standard Silicon
IEEE Micro2012Vol. 33(1), pp. 32–40
Citations Over TimeTop 18% of 2012 papers
Abstract
A methodology allows fabrication of silicon-photonic devices in standard silicon wafers, eliminating the need for silicon-on-insulator (SOI) wafers. Using this technology, the authors demonstrate low-loss silicon waveguides (2.34 dB/cm), comparable to conventional SOI channel waveguides. The ease and flexibility of this fabrication method simplify integration of electronics and photonics and make it a possible alternative to SOI-based technology for implementation of silicon-photonic devices and systems.
Related Papers
- → Heterogeneous photonic integration on silicon(2016)10 cited
- → Heterogeneous III-V/silicon photonic integrated circuits(2013)5 cited
- → III-V/silicon photonic integrated circuits for spectroscopic sensing in the 2um wavelength range(2018)2 cited
- → Oxidized Silicon-On-Insulator (OxSOI) from Bulk Silicon: a New Photonic Platform(2010)2 cited
- → Heterogeneous III-V/silicon photonic integrated circuits(2013)