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Field emission from ZrC films on Si and Mo single emitters and emitter arrays
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena1996Vol. 14(3), pp. 2090–2092
Citations Over TimeTop 10% of 1996 papers
Abstract
Field emission from ZrC films deposited on Si and Mo single emitters and field emitter arrays (FEAs) has been studied. For single emitters, the results show dramatic improvements in emitter performance by reducing work functions—on the order of 1 eV—and increasing stability. For FEAs, deposition of a ZrC film reduced the operating voltage 30%–50% at an emission current of 1.0 μA/tip and increased the emission stability.
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