Diffusion from a Thin Layer into a Semi-Infinite Medium with Concentration Dependent Diffusion Coefficient. Part II

Citations Over Time

Abstract

A formal solution of the diffusion equation is presented for a redistribution case with an initial diffusant concentration represented by a delta function and a diffusion coefficient proportional to the concentration elevated to an integer power. The time dependence of the surface concentration and of the distance of the diffusion front from the surface is discussed and shown to be different from the familiar square root law or its inverse. An example of application of this theory is provided by the high concentration diffusion of arsenic into silicon from a finite source, for which numerical data are computed.

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