Open foundry platform for high-performance electronic-photonic integration
Optics Express2012Vol. 20(11), pp. 12222–12222
Citations Over TimeTop 1% of 2012 papers
Jason S. Orcutt, Benjamin Moss, Chen Sun, Jonathan Leu, Michael Georgas, Jeffrey M. Shainline, Eugen Zgraggen, Hanqing Li, Jie Sun, Matthew J. Weaver, Stevan Urošević, Miloš A. Popović, Rajeev J. Ram, Vladimir Stojanović
Abstract
This paper presents photonic devices with 3 dB/cm waveguide loss fabricated in an existing commercial electronic 45 nm SOI-CMOS foundry process. By utilizing existing front-end fabrication processes the photonic devices are monolithically integrated with electronics in the same physical device layer as transistors achieving 4 ps logic stage delay, without degradation in transistor performance. We demonstrate an 8-channel optical microring-resonator filter bank and optical modulators, both controlled by integrated digital circuits. By developing a device design methodology that requires zero process infrastructure changes, a widely available platform for high-performance photonic-electronic integrated circuits is enabled.
Related Papers
- → III-V-on-silicon photonic integrated circuits for optical interconnects(2015)3 cited
- → Silicon photonic integrated circuits(2016)2 cited
- → Progress in III-V/SOI photonic integrated circuits(2009)1 cited
- → Silicon Nanophotonics and Its Applications in Sensing(2007)2 cited
- → SiON waveguide and polymer waveguide for optical interconnects of silicon photonics(2020)