Taylor G. Smith
University of California, Los Angeles(US)University of California System(US)
Publications by Year
Research Areas
Plasma Diagnostics and Applications, Copper Interconnects and Reliability, Semiconductor materials and devices, Electrocatalysts for Energy Conversion, Ionic liquids properties and applications
Most-Cited Works
- → Future of plasma etching for microelectronics: Challenges and opportunities(2024)115 cited
- → Plasma nitridation for atomic layer etching of Ni(2024)4 cited
- → Depoisoning Catalysts by Atomic Layer Etching(2025)2 cited
- → Thermochemical prediction of runaway energetic reactions involving organometallic (Al, In) and silane precursors in deposition tools(2021)1 cited
- → Etch Products of Copper Atomic Layer Etching by Oxidation and Formic Acid Vapor(2025)1 cited
- → Atomic Layer Etching in Patterning Materials: Anisotropy, Selectivity, Specificity and Sustainability(2025)