Paul Zimmerman
University of Michigan(US)Philadelphia History Museum(US)Penn Center for AIDS Research(US)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Semiconductor materials and devices, Nanofabrication and Lithography Techniques, Advancements in Semiconductor Devices and Circuit Design, Integrated Circuits and Semiconductor Failure Analysis
Most-Cited Works
- → High performance Ge pMOS devices using a Si-compatible process flow(2006)104 cited
- → High-Performance Deep Submicron Ge pMOSFETs With Halo Implants(2007)92 cited
- → Fundamental Optical Properties of Linear and Cyclic Alkanes: VUV Absorbance and Index of Refraction(2009)73 cited
- → Development of an inorganic photoresist for DUV, EUV, and electron beam imaging(2010)67 cited
- → High refractive index and high transparency HfO2 nanocomposites for next generation lithography(2010)62 cited
- → Development of an inorganic nanoparticle photoresist for EUV, e-beam, and 193nm lithography(2011)62 cited