Demetre J. Economou
University of Houston(US)
Publications by Year
Research Areas
Plasma Diagnostics and Applications, Metal and Thin Film Mechanics, Plasma Applications and Diagnostics, Semiconductor materials and devices, Electrohydrodynamics and Fluid Dynamics
Most-Cited Works
- → Fluid simulations of glow discharges: Effect of metastable atoms in argon(1993)355 cited
- → Simulation of a direct current microplasma discharge in helium at atmospheric pressure(2006)212 cited
- → Pulsed plasma etching for semiconductor manufacturing(2014)199 cited
- → Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell(1995)158 cited
- → Realization of atomic layer etching of silicon(1996)148 cited
- → Plasma sheath model and ion energy distribution for all radio frequencies(1999)145 cited
- → The anomalous skin effect in gas discharge plasmas(1997)133 cited