Reza Abdolvand
University of Central Florida(US)
Publications by Year
Research Areas
Acoustic Wave Resonator Technologies, Advanced MEMS and NEMS Technologies, Mechanical and Optical Resonators, Photonic and Optical Devices, Ferroelectric and Piezoelectric Materials
Most-Cited Works
- → Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications(2008)221 cited
- → Micromachined Resonators: A Review(2016)217 cited
- → Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators(2008)204 cited
- → High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps(2003)171 cited
- → In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators(2011)166 cited
- → An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon(2008)145 cited
- → Sub-Micro-Gravity In-Plane Accelerometers With Reduced Capacitive Gaps and Extra Seismic Mass(2007)127 cited
- → A 4.5-mW Closed-Loop $\Delta\Sigma$ Micro-Gravity CMOS SOI Accelerometer(2006)112 cited
- → Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators(2004)98 cited
- → Quality Factor in Trench-Refilled Polysilicon Beam Resonators(2006)93 cited