Jaegu Seong
Japan Display (Japan)(JP)
Publications by Year
Research Areas
Plasma Diagnostics and Applications, Laser-induced spectroscopy and plasma, Metal and Thin Film Mechanics, Semiconductor materials and devices, Thin-Film Transistor Technologies
Most-Cited Works
- → 2022 Review of Data-Driven Plasma Science(2023)75 cited
- → Plasma information-based virtual metrology (PI-VM) and mass production process control(2022)16 cited
- → Predictive control of the plasma processes in the OLED display mass production referring to the discontinuity qualifying PI-VM(2020)16 cited
- → Micro-range uniformity control of the etching profile in the OLED display mass production referring to the PI-VM model(2021)8 cited
- → Data-driven plasma science based plasma etching process design in OLED mass production referring to PI-VM(2024)6 cited
- → Plasma heating characterization of the large area inductively coupled plasma etchers with the plasma information for managing the mass production(2024)5 cited
- → Plasma heating characterized PI (plasma information) index for large-area capacitively coupled RF discharges in the mass production system(2025)