S. V. Babu
Duke University Hospital(US)
Publications by Year
Research Areas
Advanced Surface Polishing Techniques, Diamond and Carbon-based Materials Research, Semiconductor materials and devices, Advanced machining processes and optimization, Metal and Thin Film Mechanics
Most-Cited Works
- → Excimer laser etching of polymers(1986)204 cited
- → Modification of the Preston equation for the chemical–mechanical polishing of copper(1998)167 cited
- → Hydroxyl Radical Formation in H[sub 2]O[sub 2]-Amino Acid Mixtures and Chemical Mechanical Polishing of Copper(2000)126 cited
- → Chemical mechanical polishing of thermal oxide films using silica particles coated with ceria(2002)119 cited
- → Shallow Trench Isolation Chemical Mechanical Planarization: A Review(2015)112 cited
- → Effect of pH on CMP of Copper and Tantalum(2004)104 cited
- → Almost Complete Removal of Ceria Particles Down to 10 nm Size from Silicon Dioxide Surfaces