R. Ziermann
Technische Universität Berlin(DE)Freie Universität Berlin(DE)
Publications by Year
Research Areas
Silicon Carbide Semiconductor Technologies, Advanced MEMS and NEMS Technologies, Electrical and Thermal Properties of Materials, Gas Sensing Nanomaterials and Sensors, Semiconductor materials and devices
Most-Cited Works
- → A high temperature pressure sensor prepared by selective deposition of cubic silicon carbide on SOI substrates(1999)58 cited
- → A high temperature pressure sensor with β-SiC piezoresistors on SOI substrates(2002)41 cited
- → Heteroepitaxial growth of 3C-SiC on SOI for sensor applications(1999)35 cited
- → High temperature piezoresistive β-SiC-on-SOI pressure sensor with on chip SiC thermistor(1999)33 cited
- → High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines(1998)16 cited
- → Measurement of the cylinder pressure in combustion engines with a piezoresistive β-SiC-on-SOI pressure sensor(2002)13 cited
- → Measurement of the Thermal Conductivity of Thin β-SiC Films between 80 K and 600 K(1998)2 cited
- A High Temperature Pressure Sensor With &Sic Piezoresistors On SO1 Substrates(1997)
- → Investigation of glass-cutting technology using a CO2laser(1977)