Richard A. Gottscho
Lam Research (United States)(US)
Publications by Year
Research Areas
Plasma Diagnostics and Applications, Semiconductor materials and devices, Laser-induced spectroscopy and plasma, Atomic and Molecular Physics, Advanced Chemical Physics Studies
Most-Cited Works
- → Microscopic uniformity in plasma etching(1992)604 cited
- → Overview of atomic layer etching in the semiconductor industry(2015)586 cited
- → The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges(1994)330 cited
- → Negative Ion Kinetics in RF Glow Discharges(1986)254 cited
- → Atomic Layer Etching: Rethinking the Art of Etch(2018)218 cited
- → The grand challenges of plasma etching: a manufacturing perspective(2014)174 cited
- → Glow-discharge sheath electric fields: Negative-ion, power, and frequency effects(1987)