Roger T. Howe
Knexus Research (United States)(US)
Publications by Year
Research Areas
Advanced MEMS and NEMS Technologies, Mechanical and Optical Resonators, Acoustic Wave Resonator Technologies, Force Microscopy Techniques and Applications, Photonic and Optical Devices
Most-Cited Works
- → Critical Review: Adhesion in surface micromechanical structures(1997)828 cited
- → Three-dimensional integration of nanotechnologies for computing and data storage on a single chip(2017)819 cited
- → Laterally Driven Polysilicon Resonant Microstructures(1989)737 cited
- → Surface micromachining for microelectromechanical systems(1998)637 cited
- → Photon-enhanced thermionic emission for solar concentrator systems(2010)460 cited
- → Electrostatic-comb drive of lateral polysilicon resonators(1990)452 cited
- → Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines