Stefano Dallorto
Publications by Year
Research Areas
Semiconductor materials and devices, Plasma Diagnostics and Applications, Magnetic properties of thin films, Block Copolymer Self-Assembly, Electronic and Structural Properties of Oxides
Most-Cited Works
- → Optimization of 1D ZnO@TiO2Core–Shell Nanostructures for Enhanced Photoelectrochemical Water Splitting under Solar Light Illumination(2014)212 cited
- → Atomic layer etching of SiO2 with Ar and CHF3 plasmas: A self‐limiting process for aspect ratio independent etching(2019)45 cited
- → Pattern-generation and pattern-transfer for single-digit nano devices(2016)42 cited
- → Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features(2018)23 cited
- → Balancing ion parameters and fluorocarbon chemical reactants for SiO2 pattern transfer control using fluorocarbon-based atomic layer etching(2019)8 cited
- → Heated Dot Magnetic Recording Media - Path to 10 Tdots/in2(2016)5 cited
- → Nanoscale lift-off process using field emission scanning probe lithography(2019)3 cited
- → Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses(2016)3 cited
- Enabling control of matter at the atomic level: atomic layer deposition and fluorocarbon-based atomic layer etching(2020)