Sergey Babin
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques, Optical Coatings and Gratings, Surface Roughness and Optical Measurements, Optical measurement and interference techniques
Most-Cited Works
- → An ultrahigh-resolution soft x-ray microscope for quantitative analysis of chemically heterogeneous nanomaterials(2020)78 cited
- → Super-resolution surface slope metrology of x-ray mirrors(2020)17 cited
- → Binary pseudorandom array test standard optimized for characterization of large field-of-view optical interferometers(2020)13 cited
- → Fabrication of a refractive microlens integrated onto the monomode fiber(1996)11 cited
- → Application of analytic scanning electron microscopy to critical dimensions metrology at nanometer scale(2010)10 cited
- → Characterization and operation optimization of large aperture optical interferometers using binary pseudorandom array test standards(2018)9 cited
- → Binary pseudo-random patterned structures for modulation transfer function calibration and resolution characterization of a full-field transmission soft x-ray microscope(2015)8 cited
- → Quantitative measurement of the resist heating in a variable shaped electron lithography(1997)7 cited
- → Simulation of dose variation and charging due to fogging in electron beam lithography(2013)6 cited
- → 1.5 nm fabrication of test patterns for characterization of metrological systems(2015)6 cited