Rabul Seo
Samsung (South Korea)(KR)
Publications by Year
Research Areas
Semiconductor materials and devices, Plasma Diagnostics and Applications, Laser-induced spectroscopy and plasma, Metal and Thin Film Mechanics, Copper Interconnects and Reliability
Most-Cited Works
- → Predictive control of the plasma processes in the OLED display mass production referring to the discontinuity qualifying PI-VM(2020)16 cited
- → Cause analysis of the faults in HARC etching processes by using the PI‐VM model for OLED display manufacturing(2019)10 cited
- → Data-driven plasma science based plasma etching process design in OLED mass production referring to PI-VM(2024)6 cited
- → Plasma heating characterization of the large area inductively coupled plasma etchers with the plasma information for managing the mass production(2024)5 cited