Steven M. George
University of Colorado Boulder(US)University of Colorado System(US)Christ University(IN)
Publications by Year
Research Areas
Semiconductor materials and devices, Electronic and Structural Properties of Oxides, Catalytic Processes in Materials Science, Copper Interconnects and Reliability, Advanced Chemical Physics Studies
Most-Cited Works
- → Atomic Layer Deposition: An Overview(2009)5,574 cited
- → Low-Temperature Al2O3 Atomic Layer Deposition(2004)1,350 cited
- → Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates(2002)719 cited
- → Surface Chemistry for Atomic Layer Growth(1996)673 cited
- → Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition(2003)616 cited
- → Hydrogen desorption kinetics from monohydride and dihydride species on silicon surfaces(1988)556 cited
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