Claire van Lare
ASML (Netherlands)(NL)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques, Integrated Circuits and Semiconductor Failure Analysis, Optical Coatings and Gratings, Thin-Film Transistor Technologies
Most-Cited Works
- → Light Coupling and Trapping in Ultrathin Cu(In,Ga)Se2 Solar Cells Using Dielectric Scattering Patterns(2015)110 cited
- → Microphotonic parabolic light directors fabricated by two-photon lithography(2011)88 cited
- → Controlling Fano lineshapes in plasmon-mediated light coupling into a substrate(2011)70 cited
- → Dielectric Scattering Patterns for Efficient Light Trapping in Thin-Film Solar Cells(2015)69 cited
- → Mask-absorber optimization: the next phase(2020)34 cited
- → Alternative reticles for low-k1 EUV imaging(2019)30 cited
- → Investigation into a prototype extreme ultraviolet low-n attenuated phase-shift mask(2021)18 cited
- → Overview of stitching for high NA: imaging and overlay experimental and simulation results(2023)17 cited
- → Fundamental understanding and experimental verification of bright versus dark field imaging(2020)14 cited
- → Investigation of waveguide modes in EUV mask absorbers(2021)13 cited