C. Malhaire
Institut des Nanotechnologies de Lyon(FR)
Publications by Year
Research Areas
Advanced MEMS and NEMS Technologies, Metal and Thin Film Mechanics, Acoustic Wave Resonator Technologies, Advanced Surface Polishing Techniques, Advanced Sensor and Energy Harvesting Materials
Most-Cited Works
- → PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane(2002)74 cited
- → Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment(2003)48 cited
- → All-organic electrostrictive polymer composites with low driving electrical voltages for micro-fluidic pump applications(2015)39 cited
- → Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition(2017)29 cited
- → Mode-dependent mechanical losses in disc resonators(2017)28 cited
- → Bulge test and AFM point deflection method, two technics for the mechanical characterisation of very low stiffness freestanding films(2009)27 cited
- → Ti and TiOx seeding influence on the orientation and ferroelectric properties of sputtered PZT thin films(2004)24 cited
- → Control of the Ti diffusion in Pt/Ti bottom electrodes for the fabrication of PZT thin film transducers(2002)19 cited
- → Electromechanical study of polyurethane films with carbon black nanoparticles for MEMS actuators(2014)18 cited
- → Experimental setup and realization of thin film specimens for microtensile tests(2009)17 cited