Arie den Boef
Vrije Universiteit Amsterdam(NL)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Optical Coatings and Gratings, Digital Holography and Microscopy, Advanced Surface Polishing Techniques, Near-Field Optical Microscopy
Most-Cited Works
- → Coherence collapse in single-mode semiconductor lasers due to optical feedback(1985)493 cited
- → The influence of feedback intensity on longitudinal mode properties and optical noise in index-guided semiconductor lasers(1984)252 cited
- → Low-frequency mode-hopping optical noise in AlGaAs channeled substrate lasers induced by optical feedback(1983)37 cited
- → Evaluation of a novel ultra small target technology supporting on-product overlay measurements(2012)33 cited
- → Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms(2020)27 cited
- → On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections(2013)26 cited
- → A study of swing-curve physics in diffraction-based overlay(2016)23 cited
- → Aberration calibration and correction with nano-scatterers in digital holographic microscopy for semiconductor metrology(2021)22 cited
- → Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)(2014)21 cited
- → Holistic approach using accuracy of diffraction-based integrated metrology to improve on-product performance, reduce cycle time, and cost at litho(2015)19 cited