Joost Bekaert
IMEC(BE)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques, Integrated Circuits and Semiconductor Failure Analysis, Magnetic properties of thin films, Block Copolymer Self-Assembly
Most-Cited Works
- → Local Observation of Field Polarity Dependent Flux Pinning by Magnetic Dipoles(2001)115 cited
- → Implementation of templated DSA for via layer patterning at the 7nm node(2015)114 cited
- → Direct imaging of commensurate vortex structures in ordered antidot arrays(2001)67 cited
- → Flux pinning by regular arrays of ferromagnetic dots(2000)61 cited
- → Challenges and opportunities in applying grapho-epitaxy DSA lithography to metal cut and contact/via applications(2014)52 cited
- → Performance of FlexRay: a fully programmable illumination system for generation of freeform sources on high NA immersion systems(2010)50 cited
- → Noninvasive magnetic imaging and magnetization measurement of isolated mesoscopic Co rings(2002)41 cited
- → Application challenges with double patterning technology (DPT) beyond 45 nm(2006)38 cited
- → Influence of sample geometry on vortex matter in superconducting microstructures(2004)37 cited
- → Printing the metal and contact layers for the 32- and 22-nm node: comparing positive and negative tone development process(2010)28 cited