Stephen E. Potts
Louisiana State University(US)
Publications by Year
Research Areas
Semiconductor materials and devices, Catalytic Processes in Materials Science, Electronic and Structural Properties of Oxides, Metal and Thin Film Mechanics, Copper Interconnects and Reliability
Most-Cited Works
- → Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges(2011)868 cited
- → Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films(2010)173 cited
- → Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection(2011)110 cited
- → Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma(2015)103 cited
- → Energy-enhanced atomic layer deposition for more process and precursor versatility(2013)102 cited
- → Enhanced Doping Efficiency of Al-Doped ZnO by Atomic Layer Deposition Using Dimethylaluminum Isopropoxide as an Alternative Aluminum Precursor(2013)90 cited
- → Atomic Layer Deposition(2014)89 cited
- → Electrical transport and Al doping efficiency in nanoscale ZnO films prepared by atomic layer deposition(2013)80 cited
- → Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor(2012)76 cited
- → Room‐Temperature ALD of Metal Oxide Thin Films by Energy‐Enhanced ALD(2013)70 cited