Nassir Mojarad
Paul Scherrer Institute(CH)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Microfluidic and Bio-sensing Technologies, Advanced X-ray Imaging Techniques, Integrated Circuits and Semiconductor Failure Analysis, Nanofabrication and Lithography Techniques
Most-Cited Works
- → Beyond EUV lithography: a comparative study of efficient photoresists' performance(2015)143 cited
- → Interference lithography at EUV and soft X-ray wavelengths: Principles, methods, and applications(2015)107 cited
- → Single-digit-resolution nanopatterning with extreme ultraviolet light for the 2.5 nm technology node and beyond(2015)101 cited
- → Evaluation of EUV resist performance with interference lithography towards 11 nm half-pitch and beyond(2013)78 cited
- → Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths(2014)49 cited
- → Enhancement of the intrinsic fluorescence of adenine using aluminum nanoparticle arrays(2015)32 cited
- → Measuring three-dimensional interaction potentials using optical interference(2013)21 cited
- → EUV resists towards 11nm half-pitch(2014)15 cited
- → Soft electrostatic trapping in nanofluidics(2017)15 cited
- → Glass-based geometry-induced electrostatic trapping devices for improved scattering contrast imaging of nano-objects(2015)14 cited