R. C. Cammarata
ASV (United States)(US)
Publications by Year
Research Areas
Metal and Thin Film Mechanics, Copper Interconnects and Reliability, Microstructure and mechanical properties, nanoparticles nucleation surface interactions, Semiconductor materials and devices
Most-Cited Works
- → Surface and interface stress effects in thin films(1994)928 cited
- → Physical Origins of Intrinsic Stresses in Volmer–Weber Thin Films(2002)307 cited
- → Localization Requirements for Autonomous Vehicles(2019)252 cited
- → Surface and Interface Stresses(1994)245 cited
- → Effects of surface stress on the elastic moduli of thin films and superlattices(1989)240 cited
- → Surface-stress effects on elastic properties. I. Thin metal films(1994)234 cited
- → Surface stress model for intrinsic stresses in thin films(2000)233 cited