Jeff Blackwood
Thermo Fisher Scientific (United States)(US)
Publications by Year
Research Areas
Electron and X-Ray Spectroscopy Techniques, Integrated Circuits and Semiconductor Failure Analysis, Semiconductor materials and devices, Advancements in Semiconductor Devices and Circuit Design, Advanced Electron Microscopy Techniques and Applications
Most-Cited Works
- → Hafnium carbide films and film-coated field emission cathodes(1998)21 cited
- → High-volume process monitoring of FEOL 22nm FinFET structures using an automated STEM(2013)15 cited
- → Automated STEM/EDS Metrology Characterization of 3D NAND Devices(2017)10 cited
- → High-Throughput, Site-Specific Sample Prep of Ultra-Thin TEM Lamella for Process Metrology and Failure Analysis(2012)4 cited
- → Automation to Enable Energy Dispersive X-ray Spectroscopy for High Throughput Failure Analysis and Metrology(2017)3 cited
- → Repeatability of Automated FIB Prepared TEM Samples with Low keV Cleaning(2010)1 cited
- → Advanced Ion Column Solution for Low Ion Damage Characterization and Ultra-Fine Process(2017)1 cited
- → Field emission from HfC films on Mo field emitter arrays and from HfC arrays(2002)
- → Automated Diagonal Slice and View Solution for 3D Device Structure Analysis(2018)