Wilfried Vandervorst
Imec the Netherlands(NL)IMEC(BE)
Publications by Year
Research Areas
Semiconductor materials and devices, Integrated Circuits and Semiconductor Failure Analysis, Silicon and Solar Cell Technologies, Ion-surface interactions and analysis, Force Microscopy Techniques and Applications
Most-Cited Works
- → Three-Dimensional Observation of the Conductive Filament in Nanoscaled Resistive Memory Devices(2014)334 cited
- → Island growth as a growth mode in atomic layer deposition: A phenomenological model(2004)322 cited
- → Nucleation and growth of atomic layer deposited HfO2 gate dielectric layers on chemical oxide (Si–O–H) and thermal oxide (SiO2 or Si–O–N) underlayers(2002)279 cited
- → Characterization of ALCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy(2002)250 cited
- → High-k dielectrics for future generation memory devices (Invited Paper)(2009)250 cited
- → Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy(2000)190 cited