Vicky Philipsen
Angling Trust(GB)IMEC(BE)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques, Integrated Circuits and Semiconductor Failure Analysis, Advanced X-ray Imaging Techniques, Optical Coatings and Gratings
Most-Cited Works
- → Characterization and mitigation of 3D mask effects in extreme ultraviolet lithography(2017)64 cited
- → Perspectives and tradeoffs of absorber materials for high NA EUV lithography(2020)42 cited
- → Ni-Al Alloys as Alternative EUV Mask Absorber(2018)41 cited
- → Actinic characterization and modeling of the EUV mask stack(2013)36 cited
- → Reducing EUV mask 3D effects by alternative metal absorbers(2017)32 cited
- → Calibration and verification of a stochastic model for EUV resist(2012)30 cited
- → Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers(2017)28 cited