Ivo W. Rangelow
Technische Universität Ilmenau(DE)
Publications by Year
Research Areas
Force Microscopy Techniques and Applications, Mechanical and Optical Resonators, Advanced MEMS and NEMS Technologies, Advanced Surface Polishing Techniques, Integrated Circuits and Semiconductor Failure Analysis
Most-Cited Works
- → Components for high speed atomic force microscopy(2006)237 cited
- → Critical tasks in high aspect ratio silicon dry etching for microelectromechanical systems(2003)195 cited
- → Electrostatically driven microgripper(2002)124 cited
- → Nanoscale Engineering and Optical Addressing of Single Spins in Diamond(2010)120 cited
- → Piezoresistive sensors for scanning probe microscopy(2000)113 cited
- → Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes(2003)108 cited
- → Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers