Jacky Cheng
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Industrial Vision Systems and Defect Detection, Electron and X-Ray Spectroscopy Techniques, Integrated Circuits and Semiconductor Failure Analysis, Radio Frequency Integrated Circuit Design
Most-Cited Works
- → Optimizing OPC data sampling based on "orthogonal vector space"(2011)16 cited
- → When zero picoseconds edge placement accuracy is not enough(2002)7 cited
- → Maximizing test pattern coverage for OPC model build(2006)3 cited
- → Effect of mask 3D and scanner focus difference on OPC modeling and verification(2014)3 cited
- → OPC model prediction capability improvements by accounting for mask 3D-EMF effects(2012)3 cited
- → Focused Assessment with Sonography for Trauma (FAST) training for first-year resident physicians at a university hospital in Japan: A longitudinal, observational study(2021)2 cited
- Optimizing OPC data sampling based on(2011)
- → Introducing a novel flow to estimate challenges encountered while transitioning from RET development to manufacturable solution(2013)1 cited
- → GAOPC improves OPC parameter search efficiency and convergence speed(2024)