P. Vettiger
École Polytechnique Fédérale de Lausanne(CH)University of Neuchâtel(CH)
Publications by Year
Research Areas
Advanced MEMS and NEMS Technologies, Force Microscopy Techniques and Applications, Semiconductor Lasers and Optical Devices, Photonic and Optical Devices, Mechanical and Optical Resonators
Most-Cited Works
- → High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS(1998)572 cited
- → Ion-beam patterning of magnetic films using stencil masks(1999)196 cited
- → Ultrahigh density, high-data-rate NEMS-based AFM data storage system(1999)183 cited
- → Temperature dependence of the force sensitivity of silicon cantilevers(2004)166 cited
- → Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist(1998)149 cited
- → Wafer-Scale Microdevice Transfer/Interconnect: Its Application in an AFM-Based Data-Storage System(2004)88 cited
- → Patterning magnetic films by ion beam irradiation(2000)