Kapil Sawlani
Lam Research (United States)(US)
Publications by Year
Research Areas
Laser-induced spectroscopy and plasma, Plasma Diagnostics and Applications, Magnetic confinement fusion research, Plasma Applications and Diagnostics, Industrial Vision Systems and Defect Detection
Most-Cited Works
- → 2022 Review of Data-Driven Plasma Science(2023)75 cited
- → Deep Learning for Classification of the Chemical Composition of Particle Defects on Semiconductor Wafers(2020)68 cited
- → Perspectives on artificial intelligence for plasma-assisted manufacturing in semiconductor industry(2024)6 cited
- Effects of Secondary Electron Emission on the Plasma Sheath and Local Electron Energy Distribution with Application to Hall Thrusters.(2015)
- → Aerodynamically enhanced atomospheric pressure plasma jet for polymer treatment(2011)
- Experimental Evidence of Change in Sheath Properties due to Secondary Electron Emission in a Crossed Field Plasma Setup(2013)
- Laser-Induced Fluorescence for Sheath Characterization in Low-Density Argon Plasmas(2013)
- → Contributors(2024)
- → Automated Design, Manufacture and Numerical Analysis of Small Dimension Nozzles for Laboratory Studies(2008)