Sander Konijnenberg
ASML (Netherlands)(NL)
Publications by Year
Research Areas
Digital Holography and Microscopy, Advanced Optical Imaging Technologies, Near-Field Optical Microscopy, Optical measurement and interference techniques, Image Processing Techniques and Applications
Most-Cited Works
- → Non-isoplanatic lens aberration correction in dark-field digital holographic microscopy for semiconductor metrology(2023)9 cited
- → Field-position dependent apodization in dark-field digital holographic microscopy for semiconductor metrology(2022)9 cited
- → Computational vibration mitigation using phase interpolation in digital holographic microscopy for overlay metrology(2024)3 cited
- → Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy(2022)
- → Non-isoplanatic lens aberration corrections in digital holographic microscopy(2023)
- → Digital image correction methods using dark-field digital holographic microscopy for semiconductor metrology(2023)