Mustafa Mert Torunbalcı
Google (United States)(US)
Publications by Year
Research Areas
Advanced MEMS and NEMS Technologies, 3D IC and TSV technologies, Electronic Packaging and Soldering Technologies, Quantum Computing Algorithms and Architecture, Quantum Information and Cryptography
Most-Cited Works
- → A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die(2015)79 cited
- → Wafer level hermetic sealing of MEMS devices with vertical feedthroughs using anodic bonding(2015)68 cited
- → An FBAR Circulator(2018)59 cited
- → Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs(2015)41 cited
- → Engineering new limits to magnetostriction through metastability in iron-gallium alloys(2021)40 cited
- → Modular Compact Modeling of MTJ Devices(2018)35 cited
- → An All-Silicon Process Platform for Wafer-Level Vacuum Packaged MEMS Devices(2021)24 cited
- → Comparison of Two Alternative Silicon-on-Glass Microfabrication Processes for MEMS Inertial Sensors(2011)22 cited
- → A method and electrical model for the anodic bonding of SOI and glass wafers(2012)16 cited
- → Wafer level hermetic encapsulation of MEMS inertial sensors using SOI cap wafers with vertical feedthroughs(2014)16 cited