Wei Pan
Nanjing University of Science and Technology(CN)Henan Academy of Sciences(CN)Taiwan Semiconductor Manufacturing Company (China)(CN)Zaozhuang University(CN)
Publications by Year
Research Areas
Ferroelectric and Piezoelectric Materials, Semiconductor materials and devices, Acoustic Wave Resonator Technologies, Plasma Diagnostics and Applications, Metal and Thin Film Mechanics
Most-Cited Works
- → Reactive Ion Etching of Lead Zirconate Titanate (PZT) Thin Film Capacitors(1993)59 cited
- → High performance of La-doped Y2O3 transparent ceramics(2020)56 cited
- → Reactive ion etching of RuO2 thin films using the gas mixture O2/CF3CFH2(1994)48 cited
- → Reactive ion etching damage to the electrical properties of ferroelectric thin films(1998)32 cited
- → Reactive ion etching of PbZr1−x TixO3 and RuO2 films by environmentally safe gases(1994)32 cited
- → Reactive ion etching of ferroelectric SrBi2TaxNb2−xO9 thin films(1996)21 cited