Satoru Kawaguchi
Muroran Institute of Technology(JP)
Publications by Year
Research Areas
Plasma Diagnostics and Applications, Plasma Applications and Diagnostics, Semiconductor materials and devices, Laser Design and Applications, Catalytic Processes in Materials Science
Most-Cited Works
- → 2022 Review of Data-Driven Plasma Science(2023)75 cited
- → Arrays of Double-Decker Porphyrins on Highly Oriented Pyrolytic Graphite(2006)68 cited
- → Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies(2022)37 cited
- → Electron transport analysis in water vapor(2016)34 cited
- → Deep learning for solving the Boltzmann equation of electrons in weakly ionized plasma(2019)32 cited
- → Computational study on silicon oxide plasma enhanced chemical vapor deposition (PECVD) process using tetraethoxysilane/oxygen/argon/ helium(2019)22 cited
- → Electron collision cross section set for N 2 and electron transport in N 2 , N 2 /He, and N 2 /Ar(2021)19 cited
- → Physics-informed neural networks for solving the Boltzmann equation of the electron velocity distribution function in weakly ionized plasmas(2022)19 cited
- → Complexity visualization, dataset acquisition, and machine-learning perspectives for low-temperature plasma: a review(2022)18 cited
- → Electron transport in CF3I and CF3I-N2 mixtures(2014)18 cited