Peter L. G. Ventzek
Publications by Year
Research Areas
Plasma Diagnostics and Applications, Semiconductor materials and devices, Metal and Thin Film Mechanics, Copper Interconnects and Reliability, Laser-induced spectroscopy and plasma
Most-Cited Works
- → Two-dimensional modeling of high plasma density inductively coupled sources for materials processing(1994)333 cited
- → Two-dimensional hybrid model of inductively coupled plasma sources for etching(1993)156 cited
- → Investigation of electron source and ion flux uniformity in high plasma density inductively coupled etching tools using two-dimensional modeling(1994)136 cited
- → Future of plasma etching for microelectronics: Challenges and opportunities(2024)115 cited
- → Dynamics of excimer laser-ablated aluminum neutral atom plume measured by dye laser resonance absorption photography(1991)89 cited
- → A molecular dynamics investigation of fluorocarbon based layer-by-layer etching of silicon and SiO2(2007)87 cited
- → Laser beam deflection as a probe of laser ablation of materials(1989)81 cited
- → 2022 Review of Data-Driven Plasma Science(2023)75 cited
- → Photoacoustic and photothermal beam deflection as a probe of laser ablation of materials(1991)67 cited
- → Model for an inductively coupled Ar/c-C4F8 plasma discharge(2002)65 cited